Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
process gas
Sponge
Permalink
An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
process gas
skos:broader
process gas
mixed gas
gas
inert gas
process parameter
process condition
has head
gas
has pre modifier
process
is
skos:broader
of
carbon monoxide
co2
h2
n2
carbon dioxide
carrier gas
hydrogen h2
process gas
silane
metal
air
fluorine
oxygen
gas
case
hydrogen
nitrogen
nh3
nitrogen n2
ammonia
etchant
o2
oxygen o2
argon
bcl3
cf4
reactive gas for etching
ammonia nh3
sih4
teo
Alternative Linked Data Views:
ODE
Raw Data in:
CXML
|
CSV
| RDF (
N-Triples
N3/Turtle
JSON
XML
) | OData (
Atom
JSON
) | Microdata (
JSON
HTML
) |
JSON-LD
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