About: process parameter

Description
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- owl:sameAs
- Inference Rule:

About: process parameter Sponge Permalink

An Entity of Type : owl:Thing, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

Attributes	Values
rdfs:label	process parameter
sameAs	dbr:Process_variable
skos:broader	condition datum detail factor however process parameter several factor measure process parameter
has head	parameter
has pre modifier	process
is skos:broader of	pressure flow process variable dc dimension velocity flow rate process gas purity gas composition air flow gas flow gas pressure condition focus force length level method number power process temperature volume air composition concentration ph substrate density feed gas like film size speed time type valve exposure time gas flow rate ph value embodiment relative humidity electric field profile depth annealing temperature process temperature reaction temperature chemistry duration thickness depth of cut plasma energy electrode gap current density contact time hydraulic retention time hrt temperature profile ion flux rf power level chamber pressure deposition rate laser power rf power apply pressure reactor pressure mole ratio overlay registration temperature of the substrate substrate temperature oxide thickness

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