Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
etch
Sponge
Permalink
An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
etch
sameAs
dbr:Etch
skos:broader
removed
suitable process
process step
plasma process
method
process
structure
parameter
substrate
material
wet etch
operation
technique
wafer
etchant
layer
chamber
suitable technique
nitric acid
different process
solution of gum
etch
anisotropic etch
dry etch
has head
etch
is
skos:broader
of
metal
material
plasma
silicon nitride
wet etch
rie
silicon
etch
anisotropic etch
dry etch
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Raw Data in:
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) | OData (
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) | Microdata (
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