Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
atomic layer deposition ald
Sponge
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An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
atomic layer deposition ald
skos:broader
other method
variety of technique
suitable process
several method
monolayer
means
method
chemical vapor deposition cvd
technique
deposition process
layer
suitable method
has head
ald
has pre modifier
atomic layer deposition
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