Description
Metadata
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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
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About:
silicon nitride film
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An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
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dataset(s)
Attributes
Values
rdfs:label
silicon nitride film
skos:broader
furthermore
thin film
single layer
main component
film
material
protective film
insulator
layer
main constituent
silicon oxide film
dielectric film
insulation film
material film
passivation film
charge trapping
interlayer insulate film
silicon nitride film
has head
film
has pre modifier
silicon nitride
is
skos:broader
of
silicon oxide
region
present invention
film
material
silicon
protection film
silicon oxide film
passivation film
silicon nitride film
silicon oxynitride film
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