Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
silicon oxide film
Sponge
Permalink
An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
silicon oxide film
skos:broader
thin film
insulation material
example
object
thereafter
single layer
film
material
semiconductor layer
protective film
further
metal film
fig 5
layer
silicon
silicon oxide film
dielectric film
semiconductor film
gate insulate film
insulation film
film contain silicon
oxynitride film
sio film
interlayer insulate film
silicon nitride film
has head
film
has pre modifier
silicon oxide
is
skos:broader
of
nm
method
oxygen
film
layer
silicon
bpsg
silicon oxide film
gate insulate film
film 15
film 5
second film
oxide film
silicon nitride film
layer 104
Alternative Linked Data Views:
ODE
Raw Data in:
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N3/Turtle
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) | OData (
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