About: silicon oxide

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About: silicon oxide Sponge Permalink

An Entity of Type : owl:Thing, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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rdfs:label	silicon oxide
sameAs	dbr:Silicon_oxide
skos:broader	al dielectric material silicon dioxide alternatively materials other material thin film similar material silicon compound insulation material silicon oxide metal oxide layer component element example glass however metal problem substance also composition moreover particle substrate limited to dielectric insulative material oxide material non-conductive material compound film material oxide metal oxide thin layer inorganic material silicon nitride suitable material quartz sidewall ceramic embodiment further mixture polymer purpose surface inorganic compound rigid material residue fig 2b semiconductor device insulator semiconductor aluminum oxide inorganic oxide inorganic substance barrier property layer silicon oxide layer dielectric layer first layer protective layer surface of the substrate second layer layer 22 layer of insulate material insulation layer insulative layer insulator layer suitable dielectric material passivation layer cvd method insulation film film contain silicon low dielectric constant material gate dielectric layer silicon nitride film multi-layer structure inorganic layer second dielectric layer gate insulator stack structure mask layer dielectric layer 12 layer 6 layer of silicon oxide film 16 gate insulate film 5 gate insulate film 55 type of dielectric material low k material layer 19 isolation material mixed oxide similar dielectric material

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